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| Frame Size | Max. Thrust/Torque | Max. Stroke/Rotational Angle | Max. Speed | Resolution |
| SA65 DE/X | 25N | 10mm | 500mm/s | 0.1, 0.5µm |
| SA120 DE/X | 70N | 20mm | 800mm/s | 0.1, 0.5µm |
| SA65 DE/S | 0.5Nm | 50° | 720°/s | 0.64s |
| SA120 DE/S | 2.0Nm | 60° | 420°/s | 0.36s |
| SA200 DE/S | 4.0Nm | 280° | 270°/s | 0.25s |
| Position Repeatability | o XY axis: +/- 0.0005mm o Ɵ (rotary) axis: +/- 0.05 to 1.3 arcseconds |
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| • Available as X / XY or XYƟ using stackable linear and rotary modules | ||||
| • Direct drive linear and rotary motors (no rotary to linear losses) | ||||
| • Utilises high precision linear guides and rotary crossed roller bearings | ||||
| Data Sheet | CAT - SA-DE | CAT - SA-DE | CAT - SA-DE | CAT - SA-DE |